Then, a bottom electrode is formed on the dielectric layer and is covered by a blocking layer. The capacitor dielectric layer is formed on the substrate, and the dielectric layer is patterned to form a via opening. A via hole is formed in the substrate, and the bottom and top electrodes are interconnected through the via hole.Īnother design involves an MIM capacitor on an insulating substrate. A bottom electrode and a top electrode are formed on the dielectric layer. The capacitor dielectric layer is formed on the substrate. One design involves an MIM capacitor on a semiconductor substrate.
Various types of MIM capacitor designs have been proposed, and the size of the MIM capacitor has been reduced.
#DOWNLOAD BUKU ERLANGGA SMP KELAS 9 SERIES#
A MIM capacitor can advantageously be used as a low-loss capacitor because it typically has a lower internal series resistance than a comparable ferroelectric capacitor and also has a very low leakage current. One semiconductor device that has recently attracted a great deal of interest is the MIM capacitor. For this reason, the development of materials, structures, and processing steps is required to mitigate the effects of increasing circuit density on device performance and reliability. However, a decrease in circuit element size generally leads to an increase in resistance. One of the major goals of this effort is to decrease the size of individual circuit elements while the number of elements is increased. In particular, the invention pertains to a semiconductor device including a metal-insulator-metal (MIM) capacitor and a method for forming the same.īecause of the growing demand for higher-density integrated circuits, it has been a constant goal to develop new techniques to increase the number of components per unit area of a given integrated circuit.
This invention relates generally to a semiconductor device and a method for forming the same. Haven’t tried it on tablets and smartphones yet.
#DOWNLOAD BUKU ERLANGGA SMP KELAS 9 PC#
On PC and Mac I use Foxit Reader and it works like a charm. Not sure what happens on tablets and smartphones with PDFs. Buku Paket Pkn Smp Kelas 9 Penerbit Erlangga Tim Abdi Guru